A comparative study between pure and Al-containing amorphous carbon films prepared by FCVA technique together with high substrate pulse biasing

D. Sheeja*, B. K. Tay, J. Y. Sze, L. J. Yu, S. P. Lau

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

32 Citations (Scopus)

Fingerprint

Dive into the research topics of 'A comparative study between pure and Al-containing amorphous carbon films prepared by FCVA technique together with high substrate pulse biasing'. Together they form a unique fingerprint.

Material Science

Keyphrases