Fingerprint
Dive into the research topics of 'Atomic layer deposition for nanofabrication and interface engineering'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Atomic layer deposition for nanofabrication and interface engineering
Monan Liu, Xianglin Li, Siva Krishna Karuturi, Alfred Iing Yoong Tok, Hong Jin Fan*
*Corresponding author for this work
Research output: Contribution to journal › Review article › peer-review
88
Citations
(Scopus)