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Characterization of Ni- and Ni(Pt)-silicide formation on narrow polycrystalline Si lines by Raman spectroscopy
P. S. Lee*, D. Mangelinck, K. L. Pey, J. Ding, T. Osipowicz, C. S. Ho, G. L. Chen, L. Chan
*Corresponding author for this work
Research output: Contribution to journal › Conference article › peer-review
5
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(Scopus)