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Characterization of reactive ion etching of sol-gel SiO2 using Taguchi optimization method
Terence C.L. Wee*, Boon Siew Ooi, Yan Zhou, Yuen Chuen Chan, Yee Loy Lam
*Corresponding author for this work
Research output: Contribution to journal › Conference article › peer-review
1
Citation
(Scopus)