Characterization of titanium silicide by Raman spectroscopy for submicron IC processing

E. H. Lim*, G. Karunasiri, S. J. Chua, Z. X. Shen, H. Wong, K. L. Pey, K. H. Lee, L. Chan

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

14 Citations (Scopus)

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