Current crowding effect on copper dual damascene via bottom failure for ULSI applications

Cher Ming Tan*, Arijit Roy, A. V. Vairagar, Ahila Krishnamoorthy, Subodh G. Mhaisalkar

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

48 Citations (Scopus)

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Material Science

Engineering

Medicine and Dentistry