Delamination-induced dielectric breakdown in Cu/low-k interconnects

T. L. Tan, C. L. Gan*, A. Y. Du, Y. C. Tan, C. M. Ng

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Delamination-induced dielectric breakdown in Cu/low-k interconnects'. Together they form a unique fingerprint.

Material Science

Engineering

Keyphrases