Design and implementation of an out-of-plane electrostatic vibration energy harvester with dual-charged electret plates

Keyphrases

• Electrostatic Vibration Energy Harvester 100%
• Spiral Spring 33%
• Design Simulation 33%
• Half-power Bandwidth 33%
• Silicon Micromachining Process 33%
• Spring Hardening 33%
• CMOS Technology 33%
• Softening Nonlinearity 33%
• Random Energy 33%
• Normalized Power Density 33%
• MEMS Devices 33%
• Nonlinear MEMS 33%
• Ambient Kinetic Energy 33%
• Kinetic Energy Harvesting 33%

Engineering

• Nonlinearity 33%
• Resonator 33%
• Micro Machining 33%
• Half Power Bandwidth 33%
• Movable Disc 33%