Effect of Cu3 Sn coatings on electromigration lifetime improvement of Cu dual-damascene interconnects

M. Y. Yan*, J. O. Suh, F. Ren, K. N. Tu, A. V. Vairagar, S. G. Mhaisalkar, Ahila Krishnamoorthy

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

29 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Effect of Cu3 Sn coatings on electromigration lifetime improvement of Cu dual-damascene interconnects'. Together they form a unique fingerprint.

Engineering

Material Science

Chemistry

Keyphrases

Chemical Engineering