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Effect of electron beam treatment on adhesion of Ta/polymeric low- k interface
Zhenghao Gan*, Zhong Chen, S. G. Mhaisalkar, M. Damayanti, Zhe Chen, K. Prasad, Sam Zhang, Jiang Ning
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
6
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(Scopus)