Effect of frequency and pulse width on the properties of ta:C films prepared by FCVA together with substrate pulse biasing

D. Sheeja*, B. K. Tay, L. J. Yu, S. P. Lau, J. Y. Sze, C. K. Cheong

*Corresponding author for this work

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31 Citations (Scopus)

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Material Science

Agricultural and Biological Sciences

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Engineering