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Effects of N ion energy on titanium nitride films deposited by ion assisted filtered cathodic vacuum arc
G. Q. Yu*, B. K. Tay, S. P. Lau, K. Prasad, L. K. Pan, J. W. Chai, D. Lai
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
34
Citations
(Scopus)