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Electron-beam radiation induced degradation of silicon nitride and its impact to semiconductor failure analysis by TEM
Binghai Liu, Zhi Li Dong*, Younan Hua, Chao Fu, Xiaomin Li, Pik Kee Tan, Yuzhe Zhao
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
14
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(Scopus)