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Etching behaviour of pure and metal containing amorphous carbon films prepared using filtered cathodic vacuum arc technique
L. J. Yu, D. Sheeja*, B. K. Tay, Daniel H.C. Chua, W. I. Milne, J. Miao, Y. Q. Fu
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
7
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(Scopus)