Experimental characterization of the reliability of 3-terminal dual-damascene copper interconnect trees

C. L. Gan*, C. V. Thompson, K. L. Pey, W. K. Choi, F. Wei, B. Yu, S. P. Hau-Riege

*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

14 Citations (Scopus)

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Computer Science

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