Fabrication and characterization of piezoelectric micromachined ultrasonic transducers with thick composite PZT films

Zhihong Wang, Weiguang Zhu, Hong Zhu, Jianmin Miao, Chen Chao, Changlei Zhao, Ooi Kiang Tan

Research output: Contribution to journalArticlepeer-review

48 Citations (Scopus)

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Keyphrases

Engineering

Material Science