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Fabrication of amorphous carbon cantilever structures by isotropic and anisotropic wet etching methods
D. Sheeja*, B. K. Tay, L. J. Yu, D. H.C. Chua, W. I. Milne, J. Miao, Y. Q. Fu
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
10
Citations
(Scopus)