Fabrication of smooth amorphous carbon micro-cantilevers by lift-off

D. Sheeja*, B. K. Tay, S. P. Lau, L. J. Yu, J. M. Miao, H. C. Chua, W. I. Milne

*Corresponding author for this work

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7 Citations (Scopus)

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Keyphrases

Engineering

Material Science