Formation of ultra-shallow p+/n junctions in silicon-on-insulator (SOI) substrate using laser annealing

K. K. Ong*, K. L. Pey, P. S. Lee, A. T.S. Wee, Y. F. Chong, K. L. Yeo, X. C. Wang

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

22 Citations (Scopus)

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Material Science

Engineering