Influence of deposition pressure on the composition and structure of carbon nitride films deposited by direct current plasma assisted pulsed laser ablation

Y. H. Cheng*, Z. H. Sun, B. K. Tay, S. P. Lau, X. L. Qiao, J. G. Chen, Y. P. Wu, C. S. Xie, Y. Q. Wang, D. S. Xu, S. B. Mo, Y. B. Sun

*Corresponding author for this work

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Material Science

Chemical Engineering

Engineering