Influence of substrate bias on the microstructure and internal stress in Cu films deposited by filtered cathodic vacuum arc

Material Science

• Film 100%
• Surface Morphology 66%
• Grain Size 66%
• Crystal Structure 33%
• X-Ray Diffraction 33%
• Surface Roughness 33%
• Crystallite 33%

Keyphrases

• Preferred Orientation Growth 33%
• Surface Grain 33%
• Crystallite Structure 33%

Engineering

• Crystallite 33%
• Preferred Orientation 33%