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Kinetics of stop-flow atomic layer deposition for high aspect ratio template filling through photonic band gap measurements
Siva Krishna Karuturi, Lijun Liu, Liap Tat Su, Yang Zhao, Hong Jin Fan, Xiaochen Ge, Sailing He, Alfred Tok Iing Yoong
Research output: Contribution to journal › Article › peer-review
43
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(Scopus)