Low stress thick diamond-like carbon films prepared by filtered arc deposition for tribological applications

Keyphrases

• Filtered Arc Deposition 100%
• Tribological Applications 100%
• Single-layer Film 50%
• Wear Coefficient 50%
• Tribological Behavior 50%
• Low Friction Coefficient 50%
• Micromotors 50%
• Wear Rate 50%
• Friction 50%
• Microactuators 50%

Engineering

• Filtered Arc 100%
• Layer Film 50%
• Micro Motor 50%
• Tribological Behavior 50%

Material Science

• Coefficient of Friction 33%