Fingerprint
Dive into the research topics of 'Micromechanical properties of carbon nitride films deposited by radio-frequency-assisted filtered cathodic vacuum arc'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Micromechanical properties of carbon nitride films deposited by radio-frequency-assisted filtered cathodic vacuum arc
Y. H. Cheng*, B. K. Tay, S. P. Lau, X. L. Qiao, J. G. Chen, Z. H. Sun, C. S. Xie
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
5
Citations
(Scopus)