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"multipoint Force Feedback" Leveling of Massively Parallel Tip Arrays in Scanning Probe Lithography
Hanaul Noh, Goo Eun Jung, Sukhyun Kim, Seong Hun Yun, Ahjin Jo, Se Jong Kahng, Nam Joon Cho*, Sang Joon Cho
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
11
Citations
(Scopus)