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Optical and electrical properties of amorphous carbon films deposited using filtered cathodic vacuum arc with pulse biasing
J. Y. Sze*, B. K. Tay, D. Sheeja, S. P. Lau, Y. Q. Fu, Daniel H.C. Chua, W. I. Milne
*Corresponding author for this work
Research output: Contribution to journal › Conference article › peer-review
22
Citations
(Scopus)