Optical properties of aluminium oxide thin films prepared at room temperature by off-plane filtered cathodic vacuum arc system

Z. W. Zhao, B. K. Tay*, G. Q. Yu, D. H.C. Chua, S. P. Lau, L. K. Cheah

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

30 Citations (Scopus)

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Keyphrases

Material Science

Engineering