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Phase and layer stability of Ni- and Ni(Pt)-silicides on narrow poly-Si lines
P. S. Lee, K. L. Pey*, D. Mangelinck, J. Ding, D. Z. Chi, J. Y. Dai, L. Chan
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
29
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(Scopus)