Polycrystalline ZnO thin films on Si (1 0 0) deposited by filtered cathodic vacuum arc

X. L. Xu*, S. P. Lau, J. S. Chen, G. Y. Chen, B. K. Tay

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

221 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Polycrystalline ZnO thin films on Si (1 0 0) deposited by filtered cathodic vacuum arc'. Together they form a unique fingerprint.

Keyphrases

Engineering

Physics

Material Science