Processing and characterization of Pb(Zr, Ti)O₃ thick films on platinum-coated silicon substrate derived from sol-gel deposition

Keyphrases

• Thick Film 100%
• Silicon Substrate 100%
• Pb(Zr,Ti)O3 100%
• Sol-gel Deposition 100%
• Slurry 66%
• Annealing 33%
• Surface Modification 33%
• X Ray Diffraction 33%
• Low Temperature 33%
• Silica 33%
• Field Emission Scanning Electron Microscopy (FE-SEM) 33%
• Well-dispersed 33%
• Dielectric Properties 33%
• Precursor Solution 33%
• Si Substrate 33%
• Crystallization Process 33%
• Crystalline Particles 33%
• Sol-gel Process 33%
• Micro-electro-mechanical Systems 33%
• Crack-free 33%
• Particle Microstructure 33%
• Sol-gel Precursors 33%
• Ferroelectric Properties 33%
• Sol-gel Route 33%

Material Science

• Silicon 100%
• Platinum 100%
• Thick Films 100%
• Sol-Gel 100%
• Sol Gel Deposition 100%
• Film 66%
• Surface Treatment 33%
• Surface (Surface Science) 33%
• X-Ray Diffraction 33%
• Ferroelectric Material 33%
• Field Emission Scanning Electron Microscopy 33%
• Dielectric Property 33%
• Ferroelectricity 33%
• Crystallization 33%
• Microelectromechanical System 33%

Engineering

• Silicon Substrate 100%
• Silicon Dioxide 50%
• Ray Diffraction 50%
• Si Substrate 50%
• Low-Temperature 50%
• Dielectrics 50%
• Potential Application 50%
• Modified Surface 50%
• Microelectromechanical System 50%
• Precursor Solution 50%
• Sol-Gel Process 50%
• Field-Emission Scanning Electron Microscopy 50%