Properties of fluorinated amorphous diamond like carbon films by PECVD

G. Q. Yu*, B. K. Tay, Z. Sun, L. K. Pan

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

99 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Properties of fluorinated amorphous diamond like carbon films by PECVD'. Together they form a unique fingerprint.

Material Science

Keyphrases

Engineering