Reduction of diffraction effect for fabrication of very high aspect ratio microchannels in SU-8 over large area by soft cushion technology

Jun Zhang, Mary B. Chan-Park*, Jianmin Miao, Tie T. Sun

*Corresponding author for this work

Research output: Contribution to journal › Review article › peer-review

13 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Reduction of diffraction effect for fabrication of very high aspect ratio microchannels in SU-8 over large area by soft cushion technology'. Together they form a unique fingerprint.

Keyphrases

Engineering