Sol-gel derived thin films of LiTaO₃ on SiO₂/Si substrates for optical waveguide applications

Keyphrases

• Silica 100%
• Si Substrate 100%
• Sol-gel 100%
• Optical Waveguides 100%
• Lithium Tantalate 100%
• Atomic Force Microscopy 50%
• Annealing 50%
• X Ray Diffraction 50%
• Crystallite Size 50%
• Spin Coating 50%
• Sol-gel Method 50%
• Refractive Index 50%
• Guided Modes 50%
• Trigonal Phase 50%

Engineering

• Silicon Dioxide 100%
• Thin Films 100%
• Si Substrate 100%
• Waveguide 100%
• Atomic Force Microscopy 50%
• Ray Diffraction 50%
• Experimental Result 50%
• Size Range 50%
• Sol-Gel Process 50%
• Refractive Index 50%
• Refractivity 50%

Material Science

• Film 100%
• Thin Films 100%
• Sol-Gel 100%
• Waveguide 100%
• X-Ray Diffraction 20%
• Lithium 20%
• Annealing 20%
• Spin Coating 20%
• Refractive Index 20%
• Tantalate 20%
• Atomic Force Microscopy 20%