Studies of copper vacuum arc plasma through an off-plane double-bend filtering duct

Keyphrases

• Vacuum Arc Plasma 100%
• Plasma Beam 33%
• Drift Model 33%
• Transmission Efficiency 33%
• Potential Difference 33%
• Macroparticles 33%
• Cathodic Arc 33%
• Copper Ions 33%
• Interconnect Materials 33%
• High Deposition Rate 33%
• Filtered Vacuum Arc 33%
• Ion Motion 33%
• Deep Submicron 33%
• Radial Electric Field 33%
• Arc Plasma 33%
• Torus 33%
• Output Current 33%
• Varying Magnetic Field 33%

Engineering

• Duct 100%
• Arc Plasma 100%
• High Deposition Rate 50%
• Copper Disk 50%
• Current Output 50%
• Potential Difference 50%
• Macroparticles 50%
• Duct Wall 50%
• Copper Deposits 50%