Fingerprint
Dive into the research topics of 'Study of mechanical properties and stress of tetrahedral amorphous carbon films prepared by pulse biasing'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Study of mechanical properties and stress of tetrahedral amorphous carbon films prepared by pulse biasing
Y. B. Zhang, S. P. Lau*, D. Sheeja, B. K. Tay
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
40
Citations
(Scopus)