Synthesis of superhard and elastic carbon nitride films by filtered cathodic vacuum arc combined with radio frequency ion beam source

Y. H. Cheng, B. K. Tay, S. P. Lau, X. Shi, X. L. Qiao, J. G. Chen, Y. P. Wu, Z. H. Sun, C. S. Xie

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22 Citations (Scopus)

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