The effect of nitrogen on the mechanical properties of tetrahedral amorphous carbon films deposited with a filtered cathodic vacuum arc

E. Liu*, X. Shi, H. S. Tan, L. K. Cheah, Z. Sun, B. K. Tay, J. R. Shi

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

43 Citations (Scopus)

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