The residual pattern of double thin-film over-etching for the fabrication of continuous patterns with dimensions varying from 50 nm to millimeters over a large area

Long Qing Chen, Mary B. Chan-Park, Chun Yang, Qing Zhang

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Fingerprint

Dive into the research topics of 'The residual pattern of double thin-film over-etching for the fabrication of continuous patterns with dimensions varying from 50 nm to millimeters over a large area'. Together they form a unique fingerprint.

Material Science

Keyphrases