Thermal studies on stress-induced void-like defects in epitaxial-CoSi2 formation

C. S. Ho*, K. L. Pey, C. H. Tung, K. C. Tee, K. Prasad, D. Saigal, Jackie J.L. Tan, H. Wong, K. H. Lee, T. Osipowicz, S. J. Chua, R. P.G. Karunasiri

*Corresponding author for this work

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2 Citations (Scopus)

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Material Science

Engineering