Tribological and optical properties of hydrogen-free amorphous carbon films with varying sp³/sp² composition

Material Science

• Optical Property 100%
• Phase Composition 100%
• Carbon Films 100%
• Amorphous Carbon 100%
• Density 33%
• Surface (Surface Science) 33%
• Silicon 33%
• Film 33%
• Tetrahedral Amorphous Carbon 33%
• Silicon Wafer 33%
• Reflectivity 33%
• Diamond 33%

Keyphrases

• Hydrogen-free Amorphous Carbon 100%
• Film Release 50%
• Reflectivity Measurement 50%
• Subplantation 50%
• Carbon Diffusion 50%
• Single Silicon Wafer 50%
• Sp3-rich 50%
• Gradual Transition 50%
• Thin Interlayer 50%
• Frictional Coefficient 50%