Abstract
Very good gas sensitivity to ethanol gas has been observed in a Fe2O3 - SnO2 based gas sensor. The oxide semiconductor materials used have a composition of 6.4mol % SnO2 prepared by high energy ball milling for 110 h. To achieve good electrical contact, inter-digitized gold electrodes are used. The ratio of the electrical resistance of the sample in air Rair to that in gases Rgas. (S = Rair/Rgas) gives the gas sensitivity, is measured with a custom-fabricated, computer controlled gas sensor measurement system. A systematic characterization is carried out to study the effect of operating temperature in the range of 200°C to 400°C under different gas concentration. Three different annealing temperatures of 500°C, 600°C and 700°C are used to prepare the samples. The sensitivity obtained for 500-ppm ethanol gas is quite remarkable at 35 for the sample annealed at 500°C operating at 300°C. The gas sensing mechanism and its relationship with processing parameters are discussed.
Original language | English |
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Pages | 449-451 |
Number of pages | 3 |
Publication status | Published - 1997 |
Externally published | Yes |
Event | 7th International Symposium on IC Technology, Systems and Applications ISIC 97 - Singapore, Singapore Duration: Sept 10 1997 → Sept 12 1997 |
Conference
Conference | 7th International Symposium on IC Technology, Systems and Applications ISIC 97 |
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Country/Territory | Singapore |
City | Singapore |
Period | 9/10/97 → 9/12/97 |
ASJC Scopus Subject Areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering