Abstract
(Ba,Sr)TiO3 and Pb(Zr,Ti)O3 thin films have been prepared for hydrogen gas detection using the sol-gel and RF sputtering technology. Experimental results show that the hydrogen-sensitive leakage current is influenced significantly both by the microstructure of thin films and by their compositions. The amorphous BST and PZT thin films exhibit the promising electrical properties for hydrogen detecting devices. Studies on the transient response and impedance spectra provide substantial evidence for our proposed model regarding proton-blocking at Pd/ferroelectric interface, and the gas sensing mechanism is further elucidated.
| Original language | English |
|---|---|
| Pages (from-to) | 183-188 |
| Number of pages | 6 |
| Journal | Key Engineering Materials |
| Volume | 214-215 |
| Publication status | Published - 2002 |
| Externally published | Yes |
| Event | 1st Asian Meeting of Electroceramics - Kawasaki, Japan Duration: Oct 26 2000 → Oct 27 2000 |
ASJC Scopus Subject Areas
- General Materials Science
- Mechanics of Materials
- Mechanical Engineering
Keywords
- Amorphous
- Hydrogen gas sensor
- Sol-gel
- Sputtering
- Thin film