A progress review of proton beam writing applications in microphotonics

A. A. Bettiol; T. C. Sum; F. C. Cheong; C. H. Sow; S. Venugopal Rao; J. A. Van Kan; E. J. Teo; K. Ansari; F. Watt

doi:10.1016/j.nimb.2005.01.084

A progress review of proton beam writing applications in microphotonics

A. A. Bettiol^*, T. C. Sum, F. C. Cheong, C. H. Sow, S. Venugopal Rao, J. A. Van Kan, E. J. Teo, K. Ansari, F. Watt

^*Corresponding author for this work

National University of Singapore

Research output: Contribution to journal › Conference article › peer-review

55 Citations (Scopus)

Abstract

The proton beam writing technique is a direct write lithographic technique that is being actively developed at the Centre for Ion Beam Applications, National University of Singapore for microphotonic applications. The technique utilizes a highly focused beam of MeV protons to pattern or modify the refractive index of various materials including polymers, glasses and other inorganic crystals. The technique has been applied to the fabrication of several different types of microoptical components including waveguides, gratings, microlens arrays and colloidal crystal templates. In this paper we give a review of the progress made thus far by our group and other workers in the field of microphotonics using proton beam writing.

Original language	English
Pages (from-to)	364-371
Number of pages	8
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	231
Issue number	1-4
DOIs	https://doi.org/10.1016/j.nimb.2005.01.084
Publication status	Published - Apr 2005
Externally published	Yes
Event	Nuclear Microprobe Technology and Applications Proceedings of the 9th International Conference on Nuclear Microprobe Technology and ICNMTA 2004 - Duration: Sept 13 2004 → Sept 17 2004

ASJC Scopus Subject Areas

Nuclear and High Energy Physics
Instrumentation

Keywords

Gratings
Microlens arrays
Photonics
Proton beam writing
Waveguides

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10.1016/j.nimb.2005.01.084

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Bettiol, A. A., Sum, T. C., Cheong, F. C., Sow, C. H., Venugopal Rao, S., Van Kan, J. A., Teo, E. J., Ansari, K., & Watt, F. (2005). A progress review of proton beam writing applications in microphotonics. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 231(1-4), 364-371. https://doi.org/10.1016/j.nimb.2005.01.084

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abstract = "The proton beam writing technique is a direct write lithographic technique that is being actively developed at the Centre for Ion Beam Applications, National University of Singapore for microphotonic applications. The technique utilizes a highly focused beam of MeV protons to pattern or modify the refractive index of various materials including polymers, glasses and other inorganic crystals. The technique has been applied to the fabrication of several different types of microoptical components including waveguides, gratings, microlens arrays and colloidal crystal templates. In this paper we give a review of the progress made thus far by our group and other workers in the field of microphotonics using proton beam writing.",

keywords = "Gratings, Microlens arrays, Photonics, Proton beam writing, Waveguides",

author = "Bettiol, {A. A.} and Sum, {T. C.} and Cheong, {F. C.} and Sow, {C. H.} and {Venugopal Rao}, S. and {Van Kan}, {J. A.} and Teo, {E. J.} and K. Ansari and F. Watt",

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AU - Bettiol, A. A.

AU - Sum, T. C.

AU - Cheong, F. C.

AU - Sow, C. H.

AU - Venugopal Rao, S.

AU - Van Kan, J. A.

AU - Teo, E. J.

AU - Ansari, K.

AU - Watt, F.

PY - 2005/4

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AB - The proton beam writing technique is a direct write lithographic technique that is being actively developed at the Centre for Ion Beam Applications, National University of Singapore for microphotonic applications. The technique utilizes a highly focused beam of MeV protons to pattern or modify the refractive index of various materials including polymers, glasses and other inorganic crystals. The technique has been applied to the fabrication of several different types of microoptical components including waveguides, gratings, microlens arrays and colloidal crystal templates. In this paper we give a review of the progress made thus far by our group and other workers in the field of microphotonics using proton beam writing.

KW - Gratings

KW - Microlens arrays

KW - Photonics

KW - Proton beam writing

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IS - 1-4

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Y2 - 13 September 2004 through 17 September 2004

ER -

A progress review of proton beam writing applications in microphotonics

Abstract

ASJC Scopus Subject Areas

Keywords

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