A progress review of proton beam writing applications in microphotonics

A. A. Bettiol*, T. C. Sum, F. C. Cheong, C. H. Sow, S. Venugopal Rao, J. A. Van Kan, E. J. Teo, K. Ansari, F. Watt

*Corresponding author for this work

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55 Citations (Scopus)

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Material Science