A sandwich-structured MEMS electret power generator for multi-directional vibration energy harvesting

K. Tao; S. W. Lye; N. Wang; X. Hu; J. M. Miao

doi:10.1109/TRANSDUCERS.2015.7180858

A sandwich-structured MEMS electret power generator for multi-directional vibration energy harvesting

K. Tao, S. W. Lye, N. Wang, X. Hu, J. M. Miao

Nanyang Technological University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Citations (Scopus)

Abstract

This paper presents the design, modeling and characterization of a compact MEMS electret power generator for multi-directional vibration energy harvesting. The device is built on a symmetrical square-shape resonator that could harvest kinetic energy from multiple directions by using two orthogonal vibration degrees of freedom. Sandwich structure is adopted not only to enhance the output performance, but also to reduce both vertical pull-in and horizontal electrostatic damping force with two separate 180° out-of-phase capacitive circuit. The generator can be a potential candidate towards a practical multi-directional energy harvesting device for low-level ambient vibrational energy harvesting.

Original language	English
Title of host publication	2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	51-54
Number of pages	4
ISBN (Electronic)	9781479989553
DOIs	https://doi.org/10.1109/TRANSDUCERS.2015.7180858
Publication status	Published - Aug 5 2015
Externally published	Yes
Event	18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, United States Duration: Jun 21 2015 → Jun 25 2015

Publication series

Name	2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

Conference

Conference	18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Country/Territory	United States
City	Anchorage
Period	6/21/15 → 6/25/15

Bibliographical note

Publisher Copyright:
© 2015 IEEE.

ASJC Scopus Subject Areas

Instrumentation
Electrical and Electronic Engineering

Keywords

Electret-based
Energy harvesting
MEMS
Multi-directional
Power generator
Sandwich

Access to Document

10.1109/TRANSDUCERS.2015.7180858

Cite this

Tao, K., Lye, S. W., Wang, N., Hu, X., & Miao, J. M. (2015). A sandwich-structured MEMS electret power generator for multi-directional vibration energy harvesting. In 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 (pp. 51-54). Article 7180858 (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2015.7180858

Tao, K. ; Lye, S. W. ; Wang, N. et al. / A sandwich-structured MEMS electret power generator for multi-directional vibration energy harvesting. 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 51-54 (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015).

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abstract = "This paper presents the design, modeling and characterization of a compact MEMS electret power generator for multi-directional vibration energy harvesting. The device is built on a symmetrical square-shape resonator that could harvest kinetic energy from multiple directions by using two orthogonal vibration degrees of freedom. Sandwich structure is adopted not only to enhance the output performance, but also to reduce both vertical pull-in and horizontal electrostatic damping force with two separate 180° out-of-phase capacitive circuit. The generator can be a potential candidate towards a practical multi-directional energy harvesting device for low-level ambient vibrational energy harvesting.",

keywords = "Electret-based, Energy harvesting, MEMS, Multi-directional, Power generator, Sandwich",

author = "K. Tao and Lye, {S. W.} and N. Wang and X. Hu and Miao, {J. M.}",

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doi = "10.1109/TRANSDUCERS.2015.7180858",

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Tao, K, Lye, SW, Wang, N, Hu, X & Miao, JM 2015, A sandwich-structured MEMS electret power generator for multi-directional vibration energy harvesting. in 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015., 7180858, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, Institute of Electrical and Electronics Engineers Inc., pp. 51-54, 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, Anchorage, United States, 6/21/15. https://doi.org/10.1109/TRANSDUCERS.2015.7180858

A sandwich-structured MEMS electret power generator for multi-directional vibration energy harvesting. / Tao, K.; Lye, S. W.; Wang, N. et al.
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. Institute of Electrical and Electronics Engineers Inc., 2015. p. 51-54 7180858 (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

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AU - Tao, K.

AU - Lye, S. W.

AU - Wang, N.

AU - Hu, X.

AU - Miao, J. M.

PY - 2015/8/5

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N2 - This paper presents the design, modeling and characterization of a compact MEMS electret power generator for multi-directional vibration energy harvesting. The device is built on a symmetrical square-shape resonator that could harvest kinetic energy from multiple directions by using two orthogonal vibration degrees of freedom. Sandwich structure is adopted not only to enhance the output performance, but also to reduce both vertical pull-in and horizontal electrostatic damping force with two separate 180° out-of-phase capacitive circuit. The generator can be a potential candidate towards a practical multi-directional energy harvesting device for low-level ambient vibrational energy harvesting.

AB - This paper presents the design, modeling and characterization of a compact MEMS electret power generator for multi-directional vibration energy harvesting. The device is built on a symmetrical square-shape resonator that could harvest kinetic energy from multiple directions by using two orthogonal vibration degrees of freedom. Sandwich structure is adopted not only to enhance the output performance, but also to reduce both vertical pull-in and horizontal electrostatic damping force with two separate 180° out-of-phase capacitive circuit. The generator can be a potential candidate towards a practical multi-directional energy harvesting device for low-level ambient vibrational energy harvesting.

KW - Electret-based

KW - Energy harvesting

KW - MEMS

KW - Multi-directional

KW - Power generator

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PB - Institute of Electrical and Electronics Engineers Inc.

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ER -

Tao K, Lye SW, Wang N, Hu X, Miao JM. A sandwich-structured MEMS electret power generator for multi-directional vibration energy harvesting. In 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. Institute of Electrical and Electronics Engineers Inc. 2015. p. 51-54. 7180858. (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015). doi: 10.1109/TRANSDUCERS.2015.7180858

A sandwich-structured MEMS electret power generator for multi-directional vibration energy harvesting

Abstract

Publication series

Conference

Bibliographical note

ASJC Scopus Subject Areas

Keywords

Access to Document

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