A Structure and Analysis for a MEMS Sensor Based on Bionicsprinciple

Xiaolin Wang; Jun Yang; Xiaobin Cheng

doi:10.3969/j.issn.1004-1699.2017.09.003

A Structure and Analysis for a MEMS Sensor Based on Bionicsprinciple

Xiaolin Wang^*, Jun Yang, Xiaobin Cheng

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

Abstract

Inspired by the unique structure of the ormisochraces auditory system, a kind of microelectromechanical(MEMS) sensor oriented for underwater location detection is proposed. This idea is to adopt MEMS surface passivation process to achieve a hydrophone based on micro differential capacitance detection forthe direction orientation of sound source in the low frequency range. The modal shapes of the hydrophone and the coupling amplification effect has been analyzedby using COMSOL Multiphysics. The numericalresults show that at the first resonance frequency of 333 Hz and in the range of 0°~180°, the differential capacitance unit can amplify acoustic signal amplitude and phase difference significantly, indicating of huge potential of direction orientationfor underwater applications.

Original language	English
Pages (from-to)	1318-1323
Number of pages	6
Journal	Chinese Journal of Sensors and Actuators
Volume	30
Issue number	9
DOIs	https://doi.org/10.3969/j.issn.1004-1699.2017.09.003
Publication status	Published - Sept 1 2017
Externally published	Yes

Bibliographical note

Publisher Copyright:
© 2017, The Editorial Office of Chinese Journal of Sensors and Actuators. All right reserved.

ASJC Scopus Subject Areas

Control and Systems Engineering
Electrical and Electronic Engineering

Keywords

Fly ormisochraces
MEMS
Underwater sound location

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10.3969/j.issn.1004-1699.2017.09.003

Cite this

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abstract = "Inspired by the unique structure of the ormisochraces auditory system, a kind of microelectromechanical(MEMS) sensor oriented for underwater location detection is proposed. This idea is to adopt MEMS surface passivation process to achieve a hydrophone based on micro differential capacitance detection forthe direction orientation of sound source in the low frequency range. The modal shapes of the hydrophone and the coupling amplification effect has been analyzedby using COMSOL Multiphysics. The numericalresults show that at the first resonance frequency of 333 Hz and in the range of 0°\textasciitilde{}180°, the differential capacitance unit can amplify acoustic signal amplitude and phase difference significantly, indicating of huge potential of direction orientationfor underwater applications.",

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AU - Wang, Xiaolin

AU - Yang, Jun

AU - Cheng, Xiaobin

PY - 2017/9/1

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N2 - Inspired by the unique structure of the ormisochraces auditory system, a kind of microelectromechanical(MEMS) sensor oriented for underwater location detection is proposed. This idea is to adopt MEMS surface passivation process to achieve a hydrophone based on micro differential capacitance detection forthe direction orientation of sound source in the low frequency range. The modal shapes of the hydrophone and the coupling amplification effect has been analyzedby using COMSOL Multiphysics. The numericalresults show that at the first resonance frequency of 333 Hz and in the range of 0°~180°, the differential capacitance unit can amplify acoustic signal amplitude and phase difference significantly, indicating of huge potential of direction orientationfor underwater applications.

AB - Inspired by the unique structure of the ormisochraces auditory system, a kind of microelectromechanical(MEMS) sensor oriented for underwater location detection is proposed. This idea is to adopt MEMS surface passivation process to achieve a hydrophone based on micro differential capacitance detection forthe direction orientation of sound source in the low frequency range. The modal shapes of the hydrophone and the coupling amplification effect has been analyzedby using COMSOL Multiphysics. The numericalresults show that at the first resonance frequency of 333 Hz and in the range of 0°~180°, the differential capacitance unit can amplify acoustic signal amplitude and phase difference significantly, indicating of huge potential of direction orientationfor underwater applications.

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KW - Underwater sound location

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A Structure and Analysis for a MEMS Sensor Based on Bionicsprinciple

Abstract

Bibliographical note

ASJC Scopus Subject Areas

Keywords

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