Abstract
In this study, an ionization gas sensor device assembled by a nanoneedle array and a single nanowire is reported. Each nanoneedle is hybridized and consists of the Si nanorod with platinum nanocrystallites on the top. In the device, nanoneedle arrays serve as one electrode and the single silicon nanowire as the counter electrode to form a unique asymmetric discharge space. We believe that gas between this electrode pair is polarized and directly ionized in an extremely high electrical field, which is confirmed by the microstructure characterization, gas-sensing test and theoretic calculation. The advantage of ultralow operation voltage, power consumption with trace sensing ability renders the device an extraordinary ionization gas sensor.
Original language | English |
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Article number | 8794558 |
Pages (from-to) | 3423-3428 |
Number of pages | 6 |
Journal | IEEE Sensors Journal |
Volume | 20 |
Issue number | 7 |
DOIs | |
Publication status | Published - Apr 1 2020 |
Externally published | Yes |
Bibliographical note
Publisher Copyright:© 2001-2012 IEEE.
ASJC Scopus Subject Areas
- Instrumentation
- Electrical and Electronic Engineering
Keywords
- Gas detectors
- gas discharge devices
- nanofabrication
- nanosensors
- single nanowire device