Analysis of laterally non-uniform layers and sub-micron devices by Rutherford backscattering spectrometry

D. Mangelinck*, P. S. Lee, T. Osipowitcz, K. L. Pey

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Analysis of laterally non-uniform layers and sub-micron devices by Rutherford backscattering spectrometry'. Together they form a unique fingerprint.

Material Science

Engineering

Chemistry

Keyphrases

Biochemistry, Genetics and Molecular Biology

Physics