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Analytical modeling of reservoir effect on electromigration in Cu interconnects
Zhenghao Gan*, A. M. Gusak, W. Shao, Zhong Chen, S. G. Mhaisalkar, T. Zaporozhets, K. N. Tu
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
4
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(Scopus)