Atomic layer deposition to fine-tune the surface properties and diameters of fabricated nanopores

Peng Chen; Toshiyuki Mitsui; Damon B. Farmer; Jene Golovchenko; Roy G. Gordon; Daniel Branton

doi:10.1021/nl0494001

Atomic layer deposition to fine-tune the surface properties and diameters of fabricated nanopores

Peng Chen, Toshiyuki Mitsui, Damon B. Farmer, Jene Golovchenko, Roy G. Gordon, Daniel Branton^*

^*Corresponding author for this work

Harvard University

Research output: Contribution to journal › Article › peer-review

376 Citations (Scopus)

Abstract

Atomic layer deposition of alumina enhanced the molecule sensing characteristics of fabricated nanopores by fine-tuning their surface properties, reducing 1/f noise, neutralizing surface charge to favor capture of DNA and other negative polyelectrolytes, and controlling the diameter and aspect ratio of the pores with near single Ångstrom precision. The control over the chemical and physical nature of the pore surface provided by atomic layer deposition produced a higher yield of functional nanopore detectors.

Original language	English
Pages (from-to)	1333-1337
Number of pages	5
Journal	Nano Letters
Volume	4
Issue number	7
DOIs	https://doi.org/10.1021/nl0494001
Publication status	Published - Jul 2004
Externally published	Yes

ASJC Scopus Subject Areas

Bioengineering
General Chemistry
General Materials Science
Condensed Matter Physics
Mechanical Engineering

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10.1021/nl0494001

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abstract = "Atomic layer deposition of alumina enhanced the molecule sensing characteristics of fabricated nanopores by fine-tuning their surface properties, reducing 1/f noise, neutralizing surface charge to favor capture of DNA and other negative polyelectrolytes, and controlling the diameter and aspect ratio of the pores with near single {\AA}ngstrom precision. The control over the chemical and physical nature of the pore surface provided by atomic layer deposition produced a higher yield of functional nanopore detectors.",

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AU - Chen, Peng

AU - Mitsui, Toshiyuki

AU - Farmer, Damon B.

AU - Golovchenko, Jene

AU - Gordon, Roy G.

AU - Branton, Daniel

PY - 2004/7

Y1 - 2004/7

N2 - Atomic layer deposition of alumina enhanced the molecule sensing characteristics of fabricated nanopores by fine-tuning their surface properties, reducing 1/f noise, neutralizing surface charge to favor capture of DNA and other negative polyelectrolytes, and controlling the diameter and aspect ratio of the pores with near single Ångstrom precision. The control over the chemical and physical nature of the pore surface provided by atomic layer deposition produced a higher yield of functional nanopore detectors.

AB - Atomic layer deposition of alumina enhanced the molecule sensing characteristics of fabricated nanopores by fine-tuning their surface properties, reducing 1/f noise, neutralizing surface charge to favor capture of DNA and other negative polyelectrolytes, and controlling the diameter and aspect ratio of the pores with near single Ångstrom precision. The control over the chemical and physical nature of the pore surface provided by atomic layer deposition produced a higher yield of functional nanopore detectors.

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Atomic layer deposition to fine-tune the surface properties and diameters of fabricated nanopores

Abstract

ASJC Scopus Subject Areas

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